Suspension-Compatible Elastomer-Glass Micropumps Employing a Linear Topology

Tracey, M.C., Johnston, I.D., Davis, J.B. and Tan, C. (2006) Suspension-Compatible Elastomer-Glass Micropumps Employing a Linear Topology. In: In: Procs IET Seminar on MEMS Sensors and Actuators 2006 :. Institute of Electrical and Electronics Engineers (IEEE), pp. 31-38. ISBN 0-86341-627-6
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